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Ultraviolet Oxidation Device "CX Series"

Highly suitable for the electronics and semiconductor industries with ultra-high output! Supports TOC reduction in the ppb order.

The "CX Series" is a super high-output ultraviolet oxidation device that efficiently irradiates vacuum ultraviolet light (184.9 nm) generated from high-output low-pressure mercury lamps to oxidize and decompose organic substances in water. The water used in the semiconductor industry is becoming increasingly pure, and the required values for organic substance (TOC) concentration in ultra-pure water are becoming stricter. This device is suitable for reducing TOC in the ppb range. 【Features】 ■ Low-pressure UV oxidation device ■ Efficiently irradiates vacuum ultraviolet light (184.9 nm) generated from high-output low-pressure mercury lamps ■ Oxidizes and decomposes organic substances in water ■ Well-suited for reducing TOC in the ppb range *For more details, please download the PDF or feel free to contact us.

  • Ultraviolet irradiation equipment
  • Other pure water production equipment
  • High-power ultraviolet oxidation device

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